The following files can be converted via the “Convert to VAMAS File” Dialog Window.
PHI Binary files with .sur extensions
PHI ASCII (exported from .sur files): Change the file extension to .pak
PHI TRIFT ASCII (exported from TDC files): Change the file extension to .trf
Kore Technology ASCII files: Change the ASCII file extension to .prn
CMS LIMA/SIMS files: Select the .LIF binary file.
ION ToF ASCII spectral files: Change the file extension to .ion
RBD SIMS files are converted in exactly the same way as the XPS/AES files. Simply select the .txt ASCII files or use the clipboard copy/paste mechanism.
Hiden ASCII: Select the .csv file exported by the Hiden system
Millbrooks (Ron Unwin) SIMS files: Move to the directory containing the data files with the numeric file extensions and enter a new name (in the filename field on the File Dialog window) followed by the extension .sims. See VGX900 for more details about reading XPS/AES versions of these files.
RBD dynamic SIMS files are either converted using the .txt ASCII files exported from the RBD software or transferred through the clipboard using the copy/paste mechanism.
Cameca ASCII: Depth profiles from the Cameca system are exported in an ASCII format and are converted through CasaXPS by selecting the .dp_ascii files. CasaXPS assumes the ASCII file contains the raw profile information.