Download the latest version 2.3.25 of CasaXPS (< 6 Mb): includes the program file plus Scofield element library and configuration files.


Installation of CasaXPS and How to License a PC


Videos and Data used during CasaXPS Workshops are available from


XPS Data in VAMAS format (over 1400 spectra) are also available via XPSSurfA

Help Files, PDF books and videos are available via

A Beginner Guide to CasaXPS Video is also available under


Citation Information: When citing CasaXPS, please use the following paper.

N. Fairley et al, Applied Surface Science Advances (2021),