Installation of CasaXPS and How to License a PC


Videos and Data used during CasaXPS Workshops are available from


XPS Data in VAMAS format (over 1400 spectra) are also available via XPSSurfA

Download the latest version 2.3.24 of CasaXPS (< 6 Mb): includes the program file plus Scofield element library and configuration files.

Help Files, PDF books and videos are available via

A Beginner Guide to CasaXPS Video is also available under


Citation Information: When citing CasaXPS, please use the following paper.

N. Fairley et al, Applied Surface Science Advances (2021),